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Thin Film Deposition System

Thin Film Deposition System

10000000.00 - 20000000.00 INR/Unit

Product Details:


Price And Quantity

  • 10000000.00 - 20000000.00 INR/Unit
  • 1 Unit

Product Description

Optimal through-the-wall design for minimal footprint in clean room

ISO 14644-1 cleanroom standard class ISO5

D-shaped stainless still chamber 600 mm W x 540 mm D x 720 mm H

Welded water circulation channels

Fully opening door with viewports

Gate valve / Throttle valve with downstream or upstream control

Up to 5 process gases

Configuration examples :


  • EB-gun + Ion Gun + Thermal/LTE sources
  • EB-Gun + Sputtering magnetron sources



Machine Structure

two chambers


clean room and production application

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